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Advanced Optics Characterization | In Line Metrology

28.11.2017 14:37

Advanced Optics Characterization | In Line Metrology

Innolite is consequently developing in line metrology solutions consisting of ultra-precision contact and non-contact sensors.

Innolite is consequently developing in line metrology solutions consisting of ultra-precision contact and non-contact sensors, their productive machine integration as well as corresponding software routines for user friendly application. The standardized use of such metrology is a key for “driving productivity in ultra-precision technology” to Innolite. We measure dimensions, surfaces and optical axes on our machines to reach highest quality standards

Technical Specification

Tactile Sensor

Measuring Task Dimensions

Measuring Directions 3 (x, y, z), tactile

Sensitivity 0,25 μm

Contact Force0,07 N

 

Chromatic Confocal Probe

Measuring Task Surface shape, surface orientation

Measuring directions 1 (z), non-contact

Distance Sensor / Focus10 mm

Measuring Range1000 μm

Resolution 26 nm

Acceptance angle`+/- 15° @ error < 0.5 μm

Rotary Alignment of Probe0°-90°

 

LVDT Scanning Probe

Measuring TaskSurface shape, surface orientation

Measuring Directions1 (z), tactile

Sensitivity25 nm

Contact Scanning Force1 mN

 

Autocollimator

Measuring Task

Optical axis of sphere

Focal distance200 mm, 300 mm

Objectives6 automated exchange

Resolution< 1 ” of optical axis

Wavelength532nm, 634nm

Angebote Innolite